Cimetrix's New Tool Control Solution Solves Key Industry Challenges

CIMControl Framework(TM) with its Data-Driven Architecture Overcomes Substrate Handling, Supervisory Control, and Factory Automation Issues at Tool Level, Boosting OEE

Private Demos by Appointment, SEMICON West 2008, Booth #5356, North Hall, Moscone Center

SALT LAKE CITY, July 9 /PRNewswire-FirstCall/ -- Cimetrix, Inc. (BULLETIN BOARD: CMXX) , a leading provider of factory automation software and solutions for the global semiconductor industry, announced today the availability of a new and innovative tool control solution -- CIMControlFramework(TM). CIMControlFramework is the result of a joint development project between Cimetrix and semiconductor equipment leader, Axcelis Technologies, to define, build, and deploy a next generation tool control framework. The new software addresses the increasing demand for more efficient 300mm substrate handling and factory automation at the tool level as well as the need for more and better quality data. These objectives are currently the focal point of such semiconductor industry initiatives as 300mm Prime, Engineering Equipment Capabilities (EEC), Predictive and Preventive Maintenance (PPM) and Overall Equipment Effectiveness (OEE). Combined with the domain expertise of the new Cluster Tool Control Practice within the Company's Global Services department, Cimetrix now offers a complete tool control solution.

Semiconductor equipment suppliers today are required to provide tool control capabilities that support more than a dozen SEMI standards related to factory automation and control a host of commonly used substrate handling components such as robots and vacuum system hardware. In addition, data-driven initiatives by industry organizations focus on the importance of data -- accessibility of high quality data, utilizing the data to improve efficiency and productivity, and enabling future analysis of large amounts of stored data. Unfortunately, most of the existing equipment control software was developed prior to these new requirements.

"Our customers are demanding high-speed, dependable information from tool suppliers in order to improve yield, productivity, and reliability. Axcelis and Cimetrix developed software for our Integra RS tool using CIMControlFramework to deliver optimum data collection, storage, management, and analysis. Process and equipment engineers now have more information accessible to them for accurate monitoring and troubleshooting, saving them time and improving performance of the toolset," noted Bill Bintz, senior vice present of marketing, Axcelis Technologies, Inc. "Our partnership with Cimetrix was based on a shared vision of industry needs. By working together as a team during this software development, Cimetrix will gain a new product for their customers and we will benefit from the latest solution for advanced tool control."

CIMControlFramework is a .NET-based software framework for OEMs that provides the supervisory control, substrate handling, and factory automation requirements of device manufacturers and the industry. Equipment suppliers can leverage the framework features, configure or extend the framework, or integrate their own process control technology. The data-driven architecture, at the core of CIMControlFramework, utilizes the power of Cimetrix's CIMPortal(TM) product as a high speed data router, to provide a high bandwidth backbone for diagnostics and process data that is fed to multiple applications within the tool and to external factory interfaces.

In addition to CIMControlFramework, Cimetrix has extended its Global Services department with the addition of the new Cluster Tool Control Practice. Industry veteran, Mike Baker, former leading architect and systems control manager for AIXTRON/Genus, joined Cimetrix earlier this year to manage the group and drive Cimetrix's new tool control initiatives. Leveraging the functionality of CIMControlFramework and Cimetrix's domain expertise, the Cluster Tool Control Practice will provide training, support, and integration for a large scope of tool control projects.

"Listening to the needs and concerns of our 300mm customers led us to expand into advanced tool control," said Bob Reback, president and CEO of Cimetrix. "Axcelis has been an invaluable partner in helping us create CIMControlFramework through the depth of their experience and our common industry vision. Cimetrix is now able to offer 300mm equipment makers complete semiconductor equipment software solutions, allowing our customers to reduce their fixed costs and focus on their core competencies in today's highly competitive environment."

CIMControlFramework will be demonstrated at the upcoming SEMICON West 2008 at the Moscone Center in San Francisco, CA, July 14-17 at booth #5356 in the North Hall.

About Cimetrix Incorporated

Cimetrix designs, develops, markets, and supports factory automation and tool control software for the global semiconductor and electronics industries. A leading participant in SEMI standards development, Cimetrix's connectivity software allows for quick implementation of the SECS/GEM, GEM 300 and EDA standards. The company's products can be found on virtually every tool type in nearly every 300mm factory worldwide. The added-value of Cimetrix's passionate support and professional services creates the industry's only complete software solution. Key products include, CIMControlFramework, CIMConnect(TM), CIM300(TM), CIMPortal and CODE(TM) (Cimetrix Open Development Environment). For more information, please visit http://www.cimetrix.com/.